蓝宝石晶片


蓝宝石(Al2O3)晶圆具有较少的不匹配晶格和稳定的化学和物理性质,是III-V型氮化物、超导体和磁性外延薄膜的常用衬底。它们广泛应用于GaN和薄膜外延生长,蓝宝石上硅,LED市场和光学工业。

Crystal Materials99,999%, High Purity, Monocrystalline Al2O3
GradePrime, Epi-Ready
Surface OrientationC-plane, A-plane, R-plane, M-plane, N-plane, V-plane, 10-14, etc.) and, with a miscut if desired.
C-plane off-angle toward M-axis 0.2 +/- 0.1°
Diameter1'' 2'' 3'' 4'' 5'' 6'' 8'' +/- 0.1 mm
Thickness100um280um300um350um400um,430um500um600um,650um,1300um,1mm+/- 25 um
Single Side PolishedFront SurfaceEpi-polished, Ra < 0.2 nm (by AFM)
(SSP)Back SurfaceFine ground, Ra = 0.8 um to 1.2 um
Double Side PolishedFront SurfaceEpi-polished, Ra < 0.2 nm (by AFM)
(DSP)Back SurfaceEpi-polished, Ra < 0.2 nm (by AFM)
TTV< 5 um
BOW< 5 um
WARP< 5 um
Cleaning / PackagingClass 100 cleanroom cleaning and vacuum packaging,
25 pieces in one cassette packaging or single piece packaging.

Note: Custom sapphire wafers with any orientation and any thickness can be provided.please contact sales@hr-optics.com


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