薄膜偏振器由一个涂有涂层的板组成，该板相对于入射光束以布鲁斯特角定向。薄膜涂层将增强光束s偏振分量的反射率，同时保持p偏振分量的高透射率。
| Common Specification |
| Design Wavelength | 10.6μm |
| Dimension tolerance | ± 0.10 mm |
| Thickness tolerance | ± 0.10 mm |
| Parallelism | <3 arc minutes |
| Clear Aperture | >90% |
| Surface quality | S/D 40-20 |
| Surface Flatness | lambda/2 per 1inch |
