Crystal Materials | 99,999%, High Purity, Monocrystalline Al2O3 | |
Grade | Prime, Epi-Ready | |
Surface Orientation | C-plane, A-plane, R-plane, M-plane, N-plane, V-plane, 10-14, etc.) and, with a miscut if desired. | |
C-plane off-angle toward M-axis 0.2 +/- 0.1° | ||
Diameter | 1'' 2'' 3'' 4'' 5'' 6'' 8'' +/- 0.1 mm | |
Thickness | 100um、280um、300um、350um、400um,430um、500um、600um,650um,1300um,1mm+/- 25 um | |
Single Side Polished | Front Surface | Epi-polished, Ra < 0.2 nm (by AFM) |
(SSP) | Back Surface | Fine ground, Ra = 0.8 um to 1.2 um |
Double Side Polished | Front Surface | Epi-polished, Ra < 0.2 nm (by AFM) |
(DSP) | Back Surface | Epi-polished, Ra < 0.2 nm (by AFM) |
TTV | < 5 um | |
BOW | < 5 um | |
WARP | < 5 um | |
Cleaning / Packaging | Class 100 cleanroom cleaning and vacuum packaging, | |
25 pieces in one cassette packaging or single piece packaging. |
Note: Custom sapphire wafers with any orientation and any thickness can be provided.please contact sales@hr-optics.com