Sapphire Wafers


Due to the less mismatched lattice and stable chemical and physical properties, sapphire(Al2O3) wafer is the popular substrates for III-V nitrides, superconductor and magnetic epi-film. They are widely used in GaN and thin-film epitaxial growth, silicon on sapphire, LED market and optics industry.

Crystal Materials99,999%, High Purity, Monocrystalline Al2O3
GradePrime, Epi-Ready
Surface OrientationC-plane, A-plane, R-plane, M-plane, N-plane, V-plane, 10-14, etc.) and, with a miscut if desired.
C-plane off-angle toward M-axis 0.2 +/- 0.1°
Diameter1'' 2'' 3'' 4'' 5'' 6'' 8'' +/- 0.1 mm
Thickness100um280um300um350um400um,430um500um600um,650um,1300um,1mm+/- 25 um
Single Side PolishedFront SurfaceEpi-polished, Ra < 0.2 nm (by AFM)
(SSP)Back SurfaceFine ground, Ra = 0.8 um to 1.2 um
Double Side PolishedFront SurfaceEpi-polished, Ra < 0.2 nm (by AFM)
(DSP)Back SurfaceEpi-polished, Ra < 0.2 nm (by AFM)
TTV< 5 um
BOW< 5 um
WARP< 5 um
Cleaning / PackagingClass 100 cleanroom cleaning and vacuum packaging,
25 pieces in one cassette packaging or single piece packaging.

Note: Custom sapphire wafers with any orientation and any thickness can be provided.please contact sales@hr-optics.com




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